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Invited Article: Precision nanoimplantation of nitrogen vacancy centers into diamond photonic crystal cavities and waveguides

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dc.creator Schukraft, M.
dc.creator Zheng, J.
dc.creator Schröder, T.
dc.creator Mouradian, S. L.
dc.creator Walsh, M.
dc.creator Trusheim, M. E.
dc.creator Bakhru, H.
dc.creator Englund, D. R.
dc.date 2022-06-03T20:23:38Z
dc.date 2021-10-27T20:10:12Z
dc.date 2022-06-03T20:23:38Z
dc.date 2016-05
dc.date 2016-02
dc.date 2019-06-14T14:01:39Z
dc.date.accessioned 2023-03-01T18:08:32Z
dc.date.available 2023-03-01T18:08:32Z
dc.identifier 2378-0967
dc.identifier https://hdl.handle.net/1721.1/134990.2
dc.identifier.uri http://localhost:8080/xmlui/handle/CUHPOERS/278906
dc.description © 2016 Author(s). We demonstrate a self-aligned lithographic technique for precision generation of nitrogen vacancy (NV) centers within photonic nanostructures on bulk diamond substrates. The process relies on a lithographic mask with nanoscale implantation apertures for NV creation, together with larger features for producing waveguides and photonic nanocavities. This mask allows targeted nitrogen ion implantation, and precision dry etching of nanostructures on bulk diamond. We demonstrate high-yield generation of single NVs at pre-determined nanoscale target regions on suspended diamond waveguides. We report implantation into the mode maximum of diamond photonic crystal nanocavities with a single-NV per cavity yield of ∼26% and Purcell induced intensity enhancement of the zero-phonon line. The generation of NV centers aligned with diamond photonic structures marks an important tool for scalable production of optically coupled spin memories.
dc.format application/octet-stream
dc.language en
dc.publisher AIP Publishing
dc.relation http://dx.doi.org/10.1063/1.4948746
dc.relation APL Photonics
dc.rights Creative Commons Attribution 4.0 International license
dc.rights https://creativecommons.org/licenses/by/4.0/
dc.source American Institute of Physics (AIP)
dc.title Invited Article: Precision nanoimplantation of nitrogen vacancy centers into diamond photonic crystal cavities and waveguides
dc.type Article
dc.type http://purl.org/eprint/type/JournalArticle


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