Sangam: A Confluence of Knowledge Streams

Ion assisted deposition of multicomponent thin films

Show simple item record

dc.contributor Materials Engineering Science
dc.creator Li, Chen-Chung
dc.date 2014-03-14T21:21:50Z
dc.date 2014-03-14T21:21:50Z
dc.date 1994-01-15
dc.date 2005-10-20
dc.date 2005-10-20
dc.date 2005-10-20
dc.date.accessioned 2023-02-28T16:56:44Z
dc.date.available 2023-02-28T16:56:44Z
dc.identifier etd-10202005-102831
dc.identifier http://hdl.handle.net/10919/40039
dc.identifier http://scholar.lib.vt.edu/theses/available/etd-10202005-102831/
dc.identifier.uri http://localhost:8080/xmlui/handle/CUHPOERS/264457
dc.description A novel in-situ stress measurement technique to study the formation kinetics of multi component oxide thin films was developed and was applied to PbTiO₃. Single phase PbTi 0₃ thin films were formed from the reaction between films in the deposited PbO ITi0₂ multilayer. The film stoichiometry was accurately controlled by depositing individual layers of the required thickness. Development of film stresses associated with the formation of the product layer at the PbO/Ti0₂ interface of the multilayers was used to monitor growth rate of the PbTiO₃ layer. It was found that growth of the PbTiO₃ phase obeyed the parabolic law and the effective activation energy was estimated to be 108 kJ/mole. It is believed that the mechanism of this reaction was dominated by grain boundary diffusion of the participating cations.
dc.description Ph. D.
dc.format xii, 124 leaves
dc.format BTD
dc.format application/pdf
dc.format application/pdf
dc.language en
dc.publisher Virginia Tech
dc.relation OCLC# 30888329
dc.relation LD5655.V856_1994.L5.pdf
dc.rights In Copyright
dc.rights http://rightsstatements.org/vocab/InC/1.0/
dc.subject LD5655.V856 1994.L5
dc.subject Thin films
dc.title Ion assisted deposition of multicomponent thin films
dc.type Dissertation
dc.type Text


Files in this item

Files Size Format View
LD5655.V856_1994.L5.pdf 7.921Mb application/pdf View/Open

This item appears in the following Collection(s)

Show simple item record

Search DSpace


Advanced Search

Browse