| dc.contributor |
EPSRC - Engineering and Physical Sciences Research Council |
|
| dc.contributor |
Walton, Anthony |
|
| dc.creator |
Schiavone, Giuseppe |
|
| dc.creator |
Murray, Jeremy |
|
| dc.date |
2016-06-10T15:33:40Z |
|
| dc.date |
2016-08-01T04:15:28Z |
|
| dc.date.accessioned |
2023-02-17T20:53:15Z |
|
| dc.date.available |
2023-02-17T20:53:15Z |
|
| dc.identifier |
Schiavone, Giuseppe; Murray, Jeremy. (2016). A wafer mapping technique for residual stress in surface micromachined films, [dataset]. University of Edinburgh. School of Engineering. https://doi.org/10.7488/ds/1424. |
|
| dc.identifier |
https://hdl.handle.net/10283/2030 |
|
| dc.identifier |
https://doi.org/10.7488/ds/1424 |
|
| dc.identifier.uri |
http://localhost:8080/xmlui/handle/CUHPOERS/244094 |
|
| dc.description |
Data supporting a forthcoming publication. |
|
| dc.format |
application/vnd.openxmlformats-officedocument.spreadsheetml.sheet |
|
| dc.language |
eng |
|
| dc.publisher |
University of Edinburgh. School of Engineering |
|
| dc.relation |
Schiavone G et al (Accepted) IOP Journal of Micromechanics and Microengineering |
|
| dc.rights |
Creative Commons Attribution 4.0 International Public License |
|
| dc.title |
A wafer mapping technique for residual stress in surface micromachined films |
|
| dc.type |
dataset |
|